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Tungsten, graphite, and ceramics: 3,000 replacement parts for ion implanters.

Choose your implanter system on the left and search by Plansee or OEM part number. In our catalogue you will find standard parts in OEM quality alongside the Plansee Advanced Standard designs which offer a mix of improved performance and cost benefits.
Don’t see your implanter? Don’t worry, the catalogue is under construction. Just contact us at <a href="mailto: ionimplantation@plansee.com"> ionimplantation@plansee.com</a> and we will send you detailed information on the parts we provide for your implanter system.

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