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  9500 - XR BEAM STOP  (10051234)  



Application Note

The articles shown in balloons 50 - 70 make up the 3-Point Beamstop assembly and are designed to reduce specie cross-contamination when switching between B+, As+ and P+ implants.

These parts are used with a rotatable flange (not offered by Plansee) which allows users to set the configuration of the beamstop depending on the specie, preventing re-deposition of the previous beam through back-sputtering or evaporation.

Item Plansee No. Description
Status
OEM No
Qty
10 11382241 APERTURE PLATE 002083953 1 EA
20 11560965 SHIELDING,END 002082834 2 EA
30 11552698 SHIELDING,SIDE 002082833 2 EA
40 11632926 BEAM STOP 002082832 1 EA
50 11882822 3 POSITION BEAM STOP 1   002083787 1 STK
60 11882823 3 POSITION BEAM STOP 2   002083786 1 STK
70 11882824 3 POSITION BEAM STOP 3 002083785 1 STK