Advanced ion implanter spare parts

QII FLIGHT TUBE (10049492)

Application Note:

By adding texturing to the cover, #50, a reduction in flaking was observed in the assembly. The small ledge added also increased part life on the neutral insert, #40.

Parts represented by balloons 60, 70 & 80 are textured versions of the standard parts, designed to improve deposit adhesion and reduce flaking.

10	INSERT, NEUTRAL, FLIGHT TUBE 品目番号 / 旧品目番号: 11635681		EA	OEM:002099454	1 EA	(EA)
20	OUTER INSERT FLIGHT TUBE 品目番号 / 旧品目番号: 11382244		pce	OEM:002116848	1 EA	(pce)
30	COVER, FLIGHT TUBE COLUMN 品目番号 / 旧品目番号: 11560973		pce	OEM:002099490	2 EA	(pce)
40	INSERT, GRAPHITE, FLIGHT TUBE 品目番号 / 旧品目番号: 11382284		pce	OEM:002042886	1 EA	(pce)
50	COVER, COLUMN, FLIGHT TUBE 品目番号 / 旧品目番号: 11635277		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
60	INSERT, NEUTRAL, FLIGHT TUBE 品目番号 / 旧品目番号: 11636392		EA	OEM:PLANSEE DESIGN	2 EA	(EA)
70	INSERT, OUTER, LONG, FLIGHT TUBE 品目番号 / 旧品目番号: 11636394		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
80	INSERT, GRAPHITE, FLIGHT TUBE 品目番号 / 旧品目番号: 11636393	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)