Advanced ion implanter spare parts

カタログ製作へ

VIISTA HCx/TRIDENT 90° WAVEGUIDE (10051309)

TRIDENT 90° WAVEGUIDE» (10053503)

90° EXIT APERTURE» (10047259)

90° CLIPPERS OPTIONS» (10049930)

Application Note

Plansee provides both the standard 90˚ waveguide as well as a Plansee Advance Standard (PAS) version.

The PAS assembly has been designed to maximize interchangeability of parts between tool sets, as well as provide significant increased time between PMs and maximize total part life.

See supporting documents(9 total) for modification details.

10	HCx STANDARD 90° WAVEGUIDE 品目番号 / 旧品目番号: 11706003	X Non-stock product	KIT	1 KIT	(KIT)
20	HCx PAS 90DEG WAVEGUIDE 品目番号 / 旧品目番号: 12031723		KIT	1 KIT	(KIT)
30	HCx PAS 90DEG WAVEGUIDE TEXTURED 品目番号 / 旧品目番号: 11958651	X Non-stock product	SA	1 SA	(SA)
40	TRIDENT STANDARD 90DEG WAVEGUIDE, TEXT 品目番号 / 旧品目番号: 12111455	X Non-stock product	KIT	1 KIT	(KIT)
50	TRIDENT PAS 90DEG WAVEGUIDE TEXTURED 品目番号 / 旧品目番号: 12031725	X Non-stock product	KIT	1 KIT	(KIT)