Advanced ion implanter spare parts

OPTIMA TIE-DOWN SOURCE ASSEMBLY (10051707)

Application Note

This source modification allows for easier assembly by converting the mechanism that holds the arc slit in place into a spring compression rod system.

Plansee offers a high and medium current arc slit versions that will fit on this source.

10	Cover Plate, Source, Optima 品目番号 / 旧品目番号: 11710636	X Non-stock product	pce	OEM:PLANSEE DESIGN	1 STK	(pce)
20	6-32 SHCSLV .563LG MO 品目番号 / 旧品目番号: 11636143		EA	OEM:N/A	1 EA	(EA)
30	FILAMENT INSULATOR 品目番号 / 旧品目番号: 11629918		EA	OEM:1708680	1 EA	(EA)
40	REPELLER INSULATOR 品目番号 / 旧品目番号: 11754859		pce	OEM:17121850	1 STK	(pce)
50	SUPPORT BRACKET, REPELLER, TIE DOWN 品目番号 / 旧品目番号: 11645209		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
60	ARC CHAMBER, W, MOD 品目番号 / 旧品目番号: 11662133	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
70	NUT PLATE, MOLY ELS 品目番号 / 旧品目番号: 11631984		EA	OEM:17189140	1 EA	(EA)
80	Retaining Ring, E-Type 品目番号 / 旧品目番号: 11629904		EA	OEM:4300031	4 EA	(EA)
90	ROD, RETAINING TA 品目番号 / 旧品目番号: 11631973		EA	OEM:17036440	4 EA	(EA)
100	SPRING, COMPRESSION COIL 品目番号 / 旧品目番号: 11634421		EA	OEM:40S0348	4 EA	(EA)
110	SUPPORT BRACKET, CATHODE, TIE DOWN 品目番号 / 旧品目番号: 11645210		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
120	ARC CHAMBER, W, MOD 品目番号 / 旧品目番号: 11662133	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
130	REPELLER, NO HOLE, W 品目番号 / 旧品目番号: 11633273		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
140	INNER CUP SHIELD 品目番号 / 旧品目番号: 11634588	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
150	ARC SLIT, MC, FLAT FACE, TIE DOWN 品目番号 / 旧品目番号: 11645208		EA	OEM:PLANSEE DESIGN	1 EA	(EA)