Search by OEM Material 

Tungsten, graphite, and ceramics: 3,000 replacement parts for ion implanters.

Choose your implanter system on the left and search by Plansee or OEM part number. In our catalogue you will find standard parts in OEM quality alongside the Plansee Advanced Standard designs which offer a mix of improved performance and cost benefits.
Don’t see your implanter? Don’t worry, the catalogue is under construction. Just contact us at and we will send you detailed information on the parts we provide for your implanter system.

Already a customer? Get your login and be up-to-date at all times.

  • Review your open and completed orders
  • Shipment details and tracking numbers
  • Invoices

Contact us: We will gladly give you a personal login.