× Contact us
 

search
 

Home » AXCELIS MISCELLANEOUS (10058495)

EN
English 
日本語
LogIn

Create Catalog PDF Create Catalog PDF

  AXCELIS MISCELLANEOUS (10058495)  



SOURCE SUPPORT BLOCK»  (10069244)

SOURCE SUPPORT BLOCK

LEGACY FILAMENT CLAMP ASSEMBLY»  (10069245)

LEGACY FILAMENT CLAMP ASSEMBLY

LEGACY SOURCE COMPONENTS»  (10069247)

LEGACY SOURCE COMPONENTS

APERTURE, BEAM SHUTTER UPSTREAM»  (10058496)

APERTURE, BEAM SHUTTER UPSTREAM

PAS APERTURE, BEAM SHUTTER UPSTREAM»  (10058498)

PAS APERTURE, BEAM SHUTTER UPSTREAM

APERTURE, BEAM SHUTTER DOWNSTREAM»  (10058497)

APERTURE, BEAM SHUTTER DOWNSTREAM

GSD 200 SOURCE PARTS»  (10068562)

GSD 200 SOURCE PARTS

ELS SOURCE OPTION»  (10068563)

ELS SOURCE OPTION

INSULATORS»  (10069246)

INSULATORS

GAS LINE COMPONENTS»  (10069248)

GAS LINE COMPONENTS

  • +1 760 438 9090
  • egus_sales@plansee.com
×

Please log in to our shop to be able to order. If you have no access to our Shop, please complete the

Plansee replacement components and assemblies for OEM systems
 

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

    • SOURCE SUPPORT BLOCK
    • LEGACY FILAMENT CLAMP ASSEMBLY
    • LEGACY SOURCE COMPONENTS
    • APERTURE, BEAM SHUTTER UPSTREAM
    • PAS APERTURE, BEAM SHUTTER UPSTREAM
    • APERTURE, BEAM SHUTTER DOWNSTREAM
    • GSD 200 SOURCE PARTS
    • ELS SOURCE OPTION
    • INSULATORS
    • GAS LINE COMPONENTS

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

© 2025 Plansee SE (ELECTRO-GRAPH ®)  |  Imprint  |  Privacy Protection