Advanced ion implanter spare parts

Create Catalog PDF

VARIAN VIISION (10047509)

ION SOURCE» (10058107)

ION SOURCE

EXTRACTION» (10047510)

EXTRACTION

SOURCE CHAMBER LINER» (10047511)

SOURCE CHAMBER LINER

ANALYZER» (10047605)

ANALYZER

SET UP CUP» (10047911)

SET UP CUP

PLASMA FLOOD» (10047678)

PLASMA FLOOD

BEAMLINE PARTS» (10048252)

BEAMLINE PARTS

SILICON COATED PARTS» (10047685)

SILICON COATED PARTS

Pending Obsolescence (VIISion)» (10059286)

Pending Obsolescence (VIISion)

Plansee replacement components and assemblies for OEM systems

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

© 2023 Plansee SE | Imprint | Privacy Protection