Advanced ion implanter spare parts

Create Catalog PDF

AMAT VIISTA HIGH ENERGY (10052372)

ION SOURCE» (10052226)

ION SOURCE

HEXP ION SOURCE» (10058398)

HEXP ION SOURCE

EXTRACTION ASSEMBLY» (10052658)

EXTRACTION ASSEMBLY

MANIPULATOR ASSY, V1500H» (10083193)

MANIPULATOR ASSY, V1500H

ANALYZER MAGNET WAVEGUIDE ASSY» (10051620)

ANALYZER MAGNET WAVEGUIDE ASSY

CHARGE EXCHANGE ASSY» (10052363)

CHARGE EXCHANGE ASSY

ELECTRODE ASSEMBLY, SUPPRESSION» (10052668)

ELECTRODE ASSEMBLY, SUPPRESSION

SCANNER ASSY» (10052669)

SCANNER ASSY

FILTER MAGNET WAVEGUIDE ASSY» (10052670)

FILTER MAGNET WAVEGUIDE ASSY

BEAM DUMP» (10053491)

BEAM DUMP

BEAM DUMP ASSY, SCANNER» (10078692)

BEAM DUMP ASSY, SCANNER

FLOOD GUN ASSY, V3K» (10083228)

FLOOD GUN ASSY, V3K

CAGE ASSY,SINGLE FLOOD GUN, W/O FARADAY» (10083324)

CAGE ASSY,SINGLE FLOOD GUN, W/O FARADAY

FARADAY CUP, LE ASSY» (10078691)

FARADAY CUP, LE ASSY

Plansee replacement components and assemblies for OEM systems

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

© 2024 Plansee SE (ELECTRO-GRAPH ®) | Imprint | Privacy Protection