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- ION SOURCE
- HEXP ION SOURCE
- EXTRACTION ASSEMBLY
- MANIPULATOR ASSY, V1500H
- ANALYZER MAGNET WAVEGUIDE ASSY
- CHARGE EXCHANGE ASSY
- ELECTRODE ASSEMBLY, SUPPRESSION
- SCANNER ASSY
- FILTER MAGNET WAVEGUIDE ASSY
- BEAM DUMP
- BEAM DUMP ASSY, SCANNER
- FLOOD GUN ASSY, V3K
- CAGE ASSY,SINGLE FLOOD GUN, W/O FARADAY
- FARADAY CUP, LE ASSY
APPLICATION NOTE:
Balloons 20 - 40 represent hardware that
Plansee does not support but is used on
this assembly.