Application Note
Items 20, 60, 70, 180, 190 are WL
versions of the standard liners and have
shown the ability to dramatically reduce
the halogen cycling effect present in
tools that run high levels of
fluorinated processes.
To reduce flaking, a counter-bore and
textured liners are developed to help
reduce cathode growth related shorts.
10 |
LINER, SIDE, W
品目番号 / 旧品目番号: 345837
|
pc | OEM:002086738 | 2 EA | ||
20 |
LINER, SIDE, WL
品目番号 / 旧品目番号: 11147281
|
pc | OEM:PLANSEE DESIGN | 2.000 ST | ||
30 |
LINER,BASE
品目番号 / 旧品目番号: 11412245
|
pce | OEM:002190352 | 1 STK | ||
40 |
LINER, BASE, W
品目番号 / 旧品目番号: 345844
|
pc | OEM:002086737 | 1.000 ST | ||
50 |
LINER, BASE, W
品目番号 / 旧品目番号: 11120029
|
pc | OEM:002025729 | 1 EA | ||
60 |
LINER, BASE, WL
品目番号 / 旧品目番号: 11923797
|
pce | OEM:PLANSEE DESIGN | 1 STK | ||
70 |
LINER, BASE, WL
品目番号 / 旧品目番号: 11147296
|
pc | OEM:PLANSEE DESIGN | 1.000 ST | ||
80 |
LINER, END CATHODE
品目番号 / 旧品目番号: 11631957
|
EA | OEM:002089586 | 1 EA | ||
90 |
LINER, END ANTI-CATHODE
品目番号 / 旧品目番号: 11631954
|
EA | OEM:002086740 | 1 EA | ||
100 |
LINER, END, CATHODE
品目番号 / 旧品目番号: 11372093
|
pce | OEM:002190405 | 1 STK | ||
110 |
LINER, END, ANTI-CATHODE
品目番号 / 旧品目番号: 11372090
|
pce | OEM:002090404 | 1 STK | ||
120 |
LINER, END, CATHODE, TEX, W
品目番号 / 旧品目番号: 11146704
|
pc | OEM:002025777 | 1.000 ST | ||
130 |
LINER, END, ANTI-CATHODE, TEX, W
品目番号 / 旧品目番号: 11146716
|
pc | OEM:002025733 | 1 EA | ||
140 |
Liner, End, Cathode Tungsten
品目番号 / 旧品目番号: 11372088
|
pce | OEM:PLANSEE DESIGN | 1 STK | ||
150 |
LINER, END, CATHODE, TEXT AND C-BORED
品目番号 / 旧品目番号: 11712138
|
pce | OEM:PLANSEE DESIGN | 1 STK | ||
160 |
LINER, END, CATHODE, TEX, GPH
品目番号 / 旧品目番号: 11636412
|
EA | OEM:PLANSEE DESIGN | 1 EA | ||
170 |
LINER, END, ANTI-CATHODE, TEX, GPH
品目番号 / 旧品目番号: 11627716
|
EA | OEM:PLANSEE DESIGN | 1 EA | ||
180 |
LINER, END, CATHODE, TEX, WL
品目番号 / 旧品目番号: 11120034
|
pc | OEM:PLANSEE DESIGN | 1.000 ST | ||
190 |
LINER, END, ANTI-CATHODE, TEX, WL
品目番号 / 旧品目番号: 11120032
|
pc | OEM:PLANSEE DESIGN | 1.000 ST |
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