Advanced ion implanter spare parts

XR / QUANTUM ION SOURCE LINERS (10047540)

Application Note
Items 20, 60, 70, 180, 190 are WL versions of the standard liners and have shown the ability to dramatically reduce the halogen cycling effect present in tools that run high levels of fluorinated processes.

To reduce flaking, a counter-bore and textured liners are developed to help reduce cathode growth related shorts.

10	LINER, SIDE, W 品目番号 / 旧品目番号: 345837		pc	OEM:002086738	2 EA	(pc)
20	LINER, SIDE, WL 品目番号 / 旧品目番号: 11147281		pc	OEM:PLANSEE DESIGN	2,000 ST	(pc)
30	LINER,BASE 品目番号 / 旧品目番号: 11412245		pce	OEM:002190352	1 STK	(pce)
40	LINER, BASE, W 品目番号 / 旧品目番号: 345844		pc	OEM:002086737	1,000 ST	(pc)
50	LINER, BASE, W 品目番号 / 旧品目番号: 11120029		pc	OEM:002025729	1 EA	(pc)
60	LINER, BASE, WL 品目番号 / 旧品目番号: 11923797	X Non-stock product	pce	OEM:PLANSEE DESIGN	1 STK	(pce)
70	LINER, BASE, WL 品目番号 / 旧品目番号: 11147296		pc	OEM:PLANSEE DESIGN	1,000 ST	(pc)
80	LINER, END CATHODE 品目番号 / 旧品目番号: 11631957		EA	OEM:002089586	1 EA	(EA)
90	LINER, END ANTI-CATHODE 品目番号 / 旧品目番号: 11631954		EA	OEM:002086740	1 EA	(EA)
100	LINER, END, CATHODE 品目番号 / 旧品目番号: 11372093		pce	OEM:002190405	1 STK	(pce)
110	LINER, END, ANTI-CATHODE 品目番号 / 旧品目番号: 11372090		pce	OEM:002090404	1 STK	(pce)
120	LINER, END, CATHODE, TEX, W 品目番号 / 旧品目番号: 11146704	X Non-stock product	pc	OEM:002025777	1,000 ST	(pc)
130	LINER, END, ANTI-CATHODE, TEX, W 品目番号 / 旧品目番号: 11146716		pc	OEM:002025733	1 EA	(pc)
140	Liner, End, Cathode Tungsten 品目番号 / 旧品目番号: 11372088		pce	OEM:PLANSEE DESIGN	1 STK	(pce)
150	LINER, END, CATHODE, TEXT AND C-BORED 品目番号 / 旧品目番号: 11712138	X Non-stock product	pce	OEM:PLANSEE DESIGN	1 STK	(pce)
160	LINER, END, CATHODE, TEX, GPH 品目番号 / 旧品目番号: 11636412		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
170	LINER, END, ANTI-CATHODE, TEX, GPH 品目番号 / 旧品目番号: 11627716		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
180	LINER, END, CATHODE, TEX, WL 品目番号 / 旧品目番号: 11120034		pc	OEM:PLANSEE DESIGN	1,000 ST	(pc)
190	LINER, END, ANTI-CATHODE, TEX, WL 品目番号 / 旧品目番号: 11120032		pc	OEM:PLANSEE DESIGN	1,000 ST	(pc)