Advanced ion implanter spare parts

10	SIDE PLATE, W/GAS NOZZLE, BERNAS A/C Plansee No.: 11631346	EA	OEM:E17094441	1 EA	(EA)
20	SIDE PLATE, BERNAS ARC CHAMBER Plansee No.: 11371976	pce	OEM:E17067001	1 STK	(pce)
30	FILAMENT BERNAS ARC SOURCE Plansee No.: 11372511	pce	OEM:E17069340	2 STK	(pce)
40	BASE PLATE, BERNAS A/C Plansee No.: 11632945	EA	OEM:E17094421	1 EA	(EA)
50	ARC CHAMBER TOP Plansee No.: 11632542	EA	OEM:E17120300	1 EA	(EA)
60	END PLATE, BERNAS Plansee No.: 11632050	EA	OEM:E17124440	2 EA	(EA)
70	REFLECTOR, THREADED Plansee No.: 11632048	EA	OEM:E17124430	2 EA	(EA)
80	INSULATOR, OUTER Plansee No.: 11632052	EA	OEM:E17132320	2 EA	(EA)
90	BAFFLE, INNER INSULATOR Plansee No.: 11632051	EA	OEM:E17132290	2 EA	(EA)
100	INSULATOR, INNER BERNAS Plansee No.: 11632053	EA	OEM:E17132280	2 EA	(EA)
110	GRAPHITE INSERT Plansee No.: 11602581	pce	OEM:E17121520	2 EA	(pce)
120	FILAMENT INSULATOR Plansee No.: 11632124	EA	OEM:E17131210	4 EA	(EA)
130	INSULATOR, FILAMENT, BERNAS SOURCE Plansee No.: 11632123	EA	OEM:E17092410	8 EA	(EA)
140	FILAMENT CLAMP Plansee No.: 11632176	EA	OEM:E17092400	4 EA	(EA)
150	GAS FEED TUBE Plansee No.: 11632295	EA	OEM:E17094401	1 EA	(EA)
160	RETAINER HOOK Plansee No.: 11632699	EA	OEM:E17077001	4 EA	(EA)