×
Contact us
☰
search
Home
»
AMAT VIISTA TRIDENT (10051745)
»
ION SOURCES
EN
日本語
LogIn
Create Catalog PDF
ION SOURCES (10055206)
VHC, LINER SOURCE» (10048209)
NEXGEN SOURCE» (10051439)
ASSY, SOURCE, IHC, LDPL, TRI, VAPO READY» (10081977)
TRIDENT XP SOURCE» (10057446)
TRIDENT XP2 SOURCE» (10065983)
+1 760 438 9090
egus_sales@plansee.com
×
Please log in to our shop to be able to order. If you have no access to our Shop, please complete the
LogIn
Plansee replacement components and assemblies for OEM systems
AMAT 9500 - xR (10050140)
AMAT QUANTUM I - X (10048841)
AMAT QUANTUM X+ (10047242)
AMAT VIISTA HIGH CURRENT (10048186)
AMAT VIISTA HIGH ENERGY (10052372)
AMAT VIISTA MEDIUM CURRENT (10046896)
AMAT VIISTA TRIDENT (10051745)
ION SOURCES
VHC, LINER SOURCE
NEXGEN SOURCE
ASSY, SOURCE, IHC, LDPL, TRI, VAPO READY
TRIDENT XP SOURCE
TRIDENT XP2 SOURCE
EXTRACTIONS
ISOLATION VALVE
90° WAVEGUIDES
QUADS
VARIABLE APERTURE
TRIDENT 55° WAVEGUIDE
PLASMA FLOOD GUN
END STATION
AXCELIS MISCELLANEOUS (10058495)
AXCELIS OPTIMA (10052165)
AXCELIS PARADIGM XE/HE3 (10048856)
AXCELIS PURION HIGH CURRENT (10059513)
AXCELIS PURION HIGH ENERGY (10063434)
AXCELIS PURION MEDIUM CURRENT (10048853)
ION MILLING (10069140)
NISSIN EXCEED (10047244)
SEN HIGH CURRENT (10048976)
SEN HIGH ENERGY (10048977)
SEN MEDIUM CURRENT (10048975)
SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)
SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)
SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)
VARIAN 350D (10051640)
VARIAN E1000 (10051758)
VARIAN E220/E500 (10047453)
VARIAN KESTREL (10051645)
VARIAN VIISION (10047509)
VARIAN XP (10058405)
Create Catalog PDF
