× Contact us
 

search
 

Home » AXCELIS OPTIMA (10052165) » OPTIMA SOURCE

EN
English 
日本語
LogIn

Create Catalog PDF Create Catalog PDF

  OPTIMA SOURCE  (10056366)  



SOURCE ASSEMBLIES»  (10056371)

SOURCE ASSEMBLIES

ELS2 FILAMENT ASSEMBLY»  (10049133)

ELS2 FILAMENT ASSEMBLY

OPTIMA ARC SLIT OPTIONS»  (10052163)

OPTIMA ARC SLIT OPTIONS

CATHODE OPTIONS»  (10049109)

CATHODE OPTIONS

  • +1 760 438 9090
  • egus_sales@plansee.com
×

Please log in to our shop to be able to order. If you have no access to our Shop, please complete the

Plansee replacement components and assemblies for OEM systems
 

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

    • OPTIMA SOURCE
      • SOURCE ASSEMBLIES
      • ELS2 FILAMENT ASSEMBLY
      • OPTIMA ARC SLIT OPTIONS
      • CATHODE OPTIONS
    • EXTRACTION ASSEMBLIES
    • OPTIMA BEAM LINE

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

© 2025 Plansee SE (ELECTRO-GRAPH ®)  |  Imprint  |  Privacy Protection