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AXCELIS PARADIGM XE/HE3 (10048856)
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FILAMENT ASSEMBLIES
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FILAMENT ASSEMBLIES (10056378)
ELS2 FILAMENT ASSEMBLY» (10049133)
+1 760 438 9090
egus_sales@plansee.com
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Plansee replacement components and assemblies for OEM systems
AMAT 9500 - xR (10050140)
AMAT QUANTUM I - X (10048841)
AMAT QUANTUM X+ (10047242)
AMAT VIISTA HIGH CURRENT (10048186)
AMAT VIISTA HIGH ENERGY (10052372)
AMAT VIISTA MEDIUM CURRENT (10046896)
AMAT VIISTA TRIDENT (10051745)
AXCELIS MISCELLANEOUS (10058495)
AXCELIS OPTIMA (10052165)
AXCELIS PARADIGM XE/HE3 (10048856)
PARADIGM SOURCE
SOURCE ASSEMBLIES
FILAMENT ASSEMBLIES
ELS2 FILAMENT ASSEMBLY
CATHODE OPTIONS
SOURCE MOUNTING ASSEMBLIES
PARADIGM EXTRACTION
AXCELIS PURION HIGH CURRENT (10059513)
AXCELIS PURION HIGH ENERGY (10063434)
AXCELIS PURION MEDIUM CURRENT (10048853)
ION MILLING (10069140)
NISSIN EXCEED (10047244)
SEN HIGH CURRENT (10048976)
SEN HIGH ENERGY (10048977)
SEN MEDIUM CURRENT (10048975)
SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)
SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)
SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)
VARIAN 350D (10051640)
VARIAN E1000 (10051758)
VARIAN E220/E500 (10047453)
VARIAN KESTREL (10051645)
VARIAN VIISION (10047509)
VARIAN XP (10058405)
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