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  PURION XE EXTRACTION ASSEMBLY  (10061856)  



Application Note:

Balloon 120 (SAP# 14426695 / Axcelis# 170165838) includes an additional feature to ensure full compatibility with the EXE Assembly. Aside from this improvement, it remains dimensionally identical to Axcelis# 170073260, enabling seamless use on both XE and EXE model platforms.


  Number of products:12
Product list (.XLS)
10
 ELECTRODE  Plansee No.:  11901697
pce OEM:170033320 1 STK
 
20
 PLATE SUPPRESSION  Plansee No.:  14994714
pce OEM:170166376 1 STK
 
30
 COVER, EXTRACTION INSULATOR  Plansee No.:  11867001
pce OEM:170007120 2 STK
 
40
 INSULATOR  Plansee No.:  12407796
pce OEM:170165243 2 STK
 
50
 COVER, EXTRACTION INSULATOR  Plansee No.:  11867002
pce OEM:170007130 2 STK
 
60
 LINER GROUND PLATE  Plansee No.:  11901698
pce OEM:170033330 1 STK
 
70
 GROUND ELECTRODE CARRIER  Plansee No.:  12111173
  pce OEM:170073260 1 STK
 
80
 STANDOFF, MANIPULATOR  Plansee No.:  14994711
pce OEM:170073220 4 STK
 
90
 BEAM SHIELD BOX  Plansee No.:  14996116
  pce OEM:170073230 1 STK
 
100
 BACK SUPPRESSION RING  Plansee No.:  14994712
pce OEM:170073240 1 STK
 
110
 INSULATOR MOD  Plansee No.:  14511450
pce OEM:PLANSEE DESIGN 2 STK
 
120
 GROUND CLN2NTXT GND ELECT. CARRIER  Plansee No.:  14426695
pce OEM:170165838 1 STK