Advanced ion implanter spare parts

EXCEED2000 SOURCE HEAD (10051468)

10	Arc chamber Top Plansee No.: 11371496		OEM:SOK205081	1 STK	()
20	Side Plate (A) Plansee No.: 11371476		OEM:SOK205016	1 STK	()
30	Side Plate (B) Plansee No.: 11371482		OEM:SOK205017	1 STK	()
40	Plate Plansee No.: 11371471		OEM:SOK110121	1 STK	()
50	Plate (2) Plansee No.: 11371459		OEM:SOK205020	1 STK	()
60	Arc Chamber Bottom Plansee No.: 11371525		OEM:SOK205014	1 STK	()
70	Filament 46.543/001/b Plansee No.: 11372496		OEM:SOK110027	1 STK	()
80	Reflector (filament side) Plansee No.: 11371521		OEM:SOK110125	2 STK	()
90	Filament Feed Through (2) Plansee No.: 11371513		OEM:SOK110124	2 STK	()
100	Reflector Supporter Plansee No.: 11371517		OEM:SOK110126	2 STK	()
110	FILAMENT FEEDTHROUGH 1B Plansee No.: 11637476		OEM:SOK110123	4 EA	()
120	FILAMENT FEEDTHROUGH 1A Plansee No.: 11637475		OEM:SOK110122	4 EA	()
130	INSULATOR RING (1) A Plansee No.: 11637538		OEM:SOK110111	4 EA	()
140	INSULATING RING (1B) Plansee No.: 11637477		OEM:SOK110112	4 EA	()
150	MO Clamp Filament, KDZ Plansee No.: 11232415	X Non-stock product	OEM:SOK205007	1,000 ST	()
160	MO Clamp Filament, KDZ Plansee No.: 11232397	X Non-stock product	OEM:SOK205008	1,000 ST	()
170	Electrode (Reflector) Plansee No.: 11371486		OEM:SOK110135	1 STK	()
180	Screw Electrode Plansee No.: 11371490		OEM:SOK110034	1 STK	()
190	INSULATING RING(3)B Plansee No.: 11381750		OEM:SOK110128	1 STK	()
200	INSULATING RING(3)A Plansee No.: 11381752		OEM:SOK110127	1 STK	()
210	INSULATING RING(2) Plansee No.: 11381741		OEM:SOK205029	1 STK	()
220	Nut for electrode Plansee No.: 11371488		OEM:SOK110129	1 STK	()
230	Arc Chamber Braind Plansee No.: 11371475		OEM:SOK205051	1 STK	()
240	Ta Bolt E Plansee No.: 11373029		OEM:SOK205053	1 STK	()