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  BEAM LINE PARTS  (10056397)  



ELECTROSTATIC QUADRAPOLE»  (10048794)

ELECTROSTATIC QUADRAPOLE

GSD RESOLVING APERTURE»  (10062046)

GSD RESOLVING APERTURE

GSD RESOLVING "COOLED" APERTURE»  (10062047)

GSD RESOLVING "COOLED" APERTURE

SLIT QUADRUPOLE ASSEMBLY»  (10049134)

SLIT QUADRUPOLE ASSEMBLY

POST ACCEL MANIPULATOR ASSEMBLY»  (10049001)

POST ACCEL MANIPULATOR ASSEMBLY

EMER ASSEMBLY»  (10048837)

EMER ASSEMBLY

RESOLVING EXTENSION TUBE»  (10048871)

RESOLVING EXTENSION TUBE

ELECTRON SHOWER ASSEMBLY»  (10049011)

ELECTRON SHOWER ASSEMBLY

GSD ELECTRON SHOWER ASSEMBLY»  (10064770)

GSD ELECTRON SHOWER ASSEMBLY

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Plansee replacement components and assemblies for OEM systems
 

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

    • GSD SOURCE
    • GSD EXTRACTION
    • GSD BEAM LINE
      • ANALYZER ASSEMBLIES
      • BEAM LINE PARTS
        • ELECTROSTATIC QUADRAPOLE
        • GSD RESOLVING APERTURE
        • GSD RESOLVING "COOLED" APERTURE
        • SLIT QUADRUPOLE ASSEMBLY
        • POST ACCEL MANIPULATOR ASSEMBLY
        • EMER ASSEMBLY
        • RESOLVING EXTENSION TUBE
        • ELECTRON SHOWER ASSEMBLY
        • GSD ELECTRON SHOWER ASSEMBLY
      • END STATION

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

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