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Home » SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311) » GSD SOURCE » SOURCE ASSEMBLIES

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  SOURCE ASSEMBLIES  (10056387)  



ELS2 SOURCE ASSEMBLY»  (10049132)

ELS2 SOURCE ASSEMBLY

ELS2 LINERED SOURCE ASSEMBLY»  (10051676)

ELS2 LINERED SOURCE ASSEMBLY

ELS2 SOURCE CHAMBER OPTIONS»  (10051680)

ELS2 SOURCE CHAMBER OPTIONS

ELS4 LINERED SOURCE ASSEMBLY»  (10066672)

ELS4 LINERED SOURCE ASSEMBLY

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Plansee replacement components and assemblies for OEM systems
 

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

    • GSD SOURCE
      • SOURCE ASSEMBLIES
        • ELS2 SOURCE ASSEMBLY
        • ELS2 LINERED SOURCE ASSEMBLY
        • ELS2 SOURCE CHAMBER OPTIONS
        • ELS4 LINERED SOURCE ASSEMBLY
      • FILAMENT ASSEMBLIES
      • CATHODE OPTIONS
      • REPELLER OPTIONS
      • ARC SLIT OPTIONS
      • VAPORIZER COMPONENTS
      • SOURCE MOUNTING ASSEMBLIES
    • GSD EXTRACTION
    • GSD BEAM LINE

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

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