Advanced ion implanter spare parts

GSD-3-180 SOURCE (10052932)

10	WVM/TA FILAMENT Plansee No.: 11538989		OEM:17C2984	1,000 ST	()
20	Cathode Assembly Plansee No.: 11371975		OEM:11A2782	1 STK	()
30	Cathode Repeller Plansee No.: 11370867		OEM:17C3124	1 STK	()
40	INSULATOR 2642 Plansee No.: 11381808		OEM:5000132	5 STK	()
50	Mo Knob Bolt Plansee No.: 11370874		OEM:17C5290	4 STK	()
60	Cathode Support Plate（EG:56738） Plansee No.: 11622444		OEM:17C2982	1 STK	()
70	Filament Clamp Plansee No.: 11370879		OEM:17C4776	1 STK	()
80	Filament Feed Plansee No.: 11493494		OEM:17C4815	1 STK	()
90	Filament Clamp Plansee No.: 11370878		OEM:17C4775	1 STK	()
100	Filament Feed Plansee No.: 11493495		OEM:17C4814	1 STK	()
110	Front Slit Retainer Plansee No.: 11370920		OEM:17E4647	1 STK	()
120	FRONT SLIT Plansee No.: 11636639		OEM:17E4466	1 EA	()
130	Arc Chamber Plansee No.: 11370862		OEM:17D6041	1 STK	()
140	Repeller Plansee No.: 11371998		OEM:17121740	1 STK	()
150	Set Screw Molibden Plansee No.: 11370871		OEM:17121760	1 STK	()
160	REPELLER INSULATOR Plansee No.: 11754859		OEM:17121850	1 STK	()
170	Inner Cup Shield Plansee No.: 11371990		OEM:17121750	1 STK	()
180	Screw, Repeller Plansee No.: 11370941		OEM:17121770	1 STK	()
190	Gas Line Adaptor Plansee No.: 11370886		OEM:17C8405	1 STK	()
200	Set Screw Molybdenum Plansee No.: 11370872		OEM:17C2983	2 STK	()
210	INSULATOR Plansee No.: 11381314		OEM:17G2359	2 STK	()
220	Insulator Cover Plansee No.: 11370866		OEM:17C2988	2 STK	()
230	#6-32 Knob Bolt Plansee No.: 11370876		OEM:17C3360	2 STK	()
240	Spring Compression, SS Plansee No.: 11537989		OEM:40S0348	4 STK	()
250	ROD, RETAINING TA Plansee No.: 11631973		OEM:17036440	4 STK	()
260	Arc Chamber Mount Plansee No.: 11370400	X Non-stock product	OEM:17121870	1 STK	()
270	ARC CHAMBER MOUNT Plansee No.: 11381282		OEM:17C2993	1 STK	()
280	Gas feed tube Plansee No.: 11579382	X Non-stock product	OEM:11A4372	1 STK	()