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  9500 - XR MRS ASSY  (10051781)  



Application Note:

Due to the different process mixes run, alternate versions of the MRS Vane are available. These alternate designs range from lower cost models to particle reducing designs and can be seen on the MRS Vane Options Page (only available through your local Plansee representative).

Item Plansee No. Description
Status
OEM No
Qty
10 11632741 PRE MRS SLIT 002098649 1 EA
20 11632707 LOW DOSE SLIT   002080236 1 EA
30 11631437 VANE, MRS 002082810 2 EA
40 11382275 POST MRS SLIT 002097885 1 STK
50 11560964 POST MRS SLIT 002083925 1 EA