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  9500 - XR BEAM STOP  (10051234)  



Application Note

The articles shown in balloons 50 - 70 make up the 3-Point Beamstop assembly and are designed to reduce specie cross-contamination when switching between B+, As+ and P+ implants.

These parts are used with a rotatable flange (not offered by Plansee) which allows users to set the configuration of the beamstop depending on the specie, preventing re-deposition of the previous beam through back-sputtering or evaporation.


  Number of products:7
Product list (.XLS)
10
 APERTURE PLATE  Plansee No.:  11382241
pce OEM:002083953 1 EA
 
20
 SHIELDING,END  Plansee No.:  11560965
pce OEM:002082834 2 EA
 
30
 SHIELDING,SIDE  Plansee No.:  11552698
pce OEM:002082833 2 EA
 
40
 BEAM STOP  Plansee No.:  11632926
EA OEM:002082832 1 EA
 
50
 3 POSITION BEAM STOP 1  Plansee No.:  11882822
pce OEM:002083787 1 STK
 
60
 3 POSITION BEAM STOP 2  Plansee No.:  11882823
pce OEM:002083786 1 STK
 
70
 3 POSITION BEAM STOP 3  Plansee No.:  11882824
pce OEM:002083785 1 STK