Application Note
The articles shown in balloons 50 - 70
make up the 3-Point Beamstop assembly
and are designed to reduce specie
cross-contamination when switching
between B+, As+ and P+ implants.
These parts are used with a rotatable
flange (not offered by Plansee) which
allows users to set the configuration of
the beamstop depending on the specie,
preventing re-deposition of the previous
beam through back-sputtering or
evaporation.
10 |
APERTURE PLATE
Plansee No.: 11382241
|
pce | OEM:002083953 | 1 EA | ||
20 |
SHIELDING,END
Plansee No.: 11560965
|
pce | OEM:002082834 | 2 EA | ||
30 |
SHIELDING,SIDE
Plansee No.: 11552698
|
pce | OEM:002082833 | 2 EA | ||
40 |
BEAM STOP
Plansee No.: 11632926
|
EA | OEM:002082832 | 1 EA | ||
50 |
3 POSITION BEAM STOP 1
Plansee No.: 11882822
|
pce | OEM:002083787 | 1 STK | ||
60 |
3 POSITION BEAM STOP 2
Plansee No.: 11882823
|
pce | OEM:002083786 | 1 STK | ||
70 |
3 POSITION BEAM STOP 3
Plansee No.: 11882824
|
pce | OEM:002083785 | 1 STK |
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