Advanced ion implanter spare parts

QI & QII EXTRACTION ASSY (10048842)

Application Note:

The Brackets shown above are dimensionally identical to the one-for-one parts, but use slip fit graphite pins to allow users the option of only replacing the pins if breakage occurs.

10	BRACKET,SUPPRESSION ELECTRODE Plansee No.: 11380308	X Non-stock product	pce	OEM:PLANSEE DESIGN	1 EA	(pce)
20	SST FHS 1.575LG Plansee No.: 11634912	X Non-stock product	EA	OEM:369090788	4 EA	(EA)
30	MOUNTING, SUPP. ELECTRODE Plansee No.: 11633980		EA	OEM:002083974	1 EA	(EA)
40	ELECTRODE, SUPP. R150 Plansee No.: 11633332		EA	OEM:002004207	1 EA	(EA)
50	SST BHCSV .315LG Plansee No.: 11634911	X Non-stock product	EA	OEM:369090635	4 EA	(EA)
60	MOUNT PLATE, GROUND ELEC. Plansee No.: 11627706		EA	OEM:002084522	1 EA	(EA)
70	ELECTRODE, GROUND Plansee No.: 11634119		EA	OEM:002085090	1 EA	(EA)
80	SUPPRESSION RING Plansee No.: 11631883		EA	OEM:002084055	1 EA	(EA)
90	SCREW, SST FH .394LG Plansee No.: 11631448		EA	OEM:369091175	2 EA	(EA)
100	SPACER, GRAPHITE Plansee No.: 11553493		pce	OEM:002083227	4 EA	(pce)
110	BRACKET,GROUND,ELECTRODE Plansee No.: 11382096		pce	OEM:PLANSEE DESIGN	1 EA	(pce)
120	GRAPHITE PIN Plansee No.: 11632293	X Non-stock product	EA	OEM:PLANSEE DESIGN	4 EA	(EA)