×
Contact us
☰
search
Home
»
AMAT QUANTUM X+ (10047242)
»
BEAMLINE ASSEMBLIES
EN
日本語
LogIn
Create Catalog PDF
BEAMLINE ASSEMBLIES (10048765)
QX+ MRS ASSEMBLY» (10048083)
QX+ VORTEX ASSEMBLY» (10048084)
WAFER HEAD SHIELD KIT» (10047691)
+1 760 438 9090
egus_sales@plansee.com
×
Please log in to our shop to be able to order. If you have no access to our Shop, please complete the
LogIn
Plansee replacement components and assemblies for OEM systems
AMAT 9500 - xR (10050140)
AMAT QUANTUM I - X (10048841)
AMAT QUANTUM X+ (10047242)
ION SOURCES
EXTRACTION ASSEMBLIES
QUANTUM SERIES SOURCE CHAMBER
QX+ ANALYZER
BEAMLINE ASSEMBLIES
QX+ MRS ASSEMBLY
QX+ VORTEX ASSEMBLY
WAFER HEAD SHIELD KIT
QX/QX+ HDPFS ASSEMBLIES
QX+ COLLECTOR BOX
AMAT VIISTA HIGH CURRENT (10048186)
AMAT VIISTA HIGH ENERGY (10052372)
AMAT VIISTA MEDIUM CURRENT (10046896)
AMAT VIISTA TRIDENT (10051745)
AXCELIS MISCELLANEOUS (10058495)
AXCELIS OPTIMA (10052165)
AXCELIS PARADIGM XE/HE3 (10048856)
AXCELIS PURION HIGH CURRENT (10059513)
AXCELIS PURION HIGH ENERGY (10063434)
AXCELIS PURION MEDIUM CURRENT (10048853)
ION MILLING (10069140)
NISSIN EXCEED (10047244)
SEN HIGH CURRENT (10048976)
SEN HIGH ENERGY (10048977)
SEN MEDIUM CURRENT (10048975)
SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)
SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)
SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)
VARIAN 350D (10051640)
VARIAN E1000 (10051758)
VARIAN E220/E500 (10047453)
VARIAN KESTREL (10051645)
VARIAN VIISION (10047509)
VARIAN XP (10058405)
Create Catalog PDF.JPG)
.JPG "WAFER HEAD SHIELD KIT")