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AMAT QUANTUM X+ (10047242)
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BEAMLINE ASSEMBLIES
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QX+ VORTEX ASSEMBLY
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QX+ VORTEX ASSEMBLY (10048084)
+1 760 438 9090
egus_sales@plansee.com
Number of products:2
Product list (.XLS)
10
G13 ELECTRODE, DECEL LENS
Plansee No.: 11636525
EA
OEM:002082410
1 EA
(EA)
20
G14 ELECTRODE
Plansee No.: 11636524
EA
OEM:002082411
1 EA
(EA)
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Plansee replacement components and assemblies for OEM systems
AMAT 9500 - xR (10050140)
AMAT QUANTUM I - X (10048841)
AMAT QUANTUM X+ (10047242)
ION SOURCES
EXTRACTION ASSEMBLIES
QUANTUM SERIES SOURCE CHAMBER
QX+ ANALYZER
BEAMLINE ASSEMBLIES
QX+ MRS ASSEMBLY
QX+ VORTEX ASSEMBLY
WAFER HEAD SHIELD KIT
QX/QX+ HDPFS ASSEMBLIES
QX+ COLLECTOR BOX
AMAT VIISTA HIGH CURRENT (10048186)
AMAT VIISTA HIGH ENERGY (10052372)
AMAT VIISTA MEDIUM CURRENT (10046896)
AMAT VIISTA TRIDENT (10051745)
AXCELIS MISCELLANEOUS (10058495)
AXCELIS OPTIMA (10052165)
AXCELIS PARADIGM XE/HE3 (10048856)
AXCELIS PURION HIGH CURRENT (10059513)
AXCELIS PURION HIGH ENERGY (10063434)
AXCELIS PURION MEDIUM CURRENT (10048853)
ION MILLING (10069140)
NISSIN EXCEED (10047244)
SEN HIGH CURRENT (10048976)
SEN HIGH ENERGY (10048977)
SEN MEDIUM CURRENT (10048975)
SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)
SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)
SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)
VARIAN 350D (10051640)
VARIAN E1000 (10051758)
VARIAN E220/E500 (10047453)
VARIAN KESTREL (10051645)
VARIAN VIISION (10047509)
VARIAN XP (10058405)