Advanced ion implanter spare parts

QX+ SINGLE LE EXTRACTION (10048305)

Application Note:
The single low energy configuration shown includes tungsten wire mesh parts designed to replicate the electric field created by the OEM solid plates, while still allowing un-ionized gas to exit the assembly via the pumps, reducing the chances for glitching.

10	SINGLE LE ELECTRODE, SUPPRESSION Plansee No.: 11637439	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
20	TUNGSTEN MESH FRAME, LARGE Plansee No.: 11637436	X Non-stock product	AS	OEM:PLANSEE DESIGN	4 AS	(AS)
30	TUNGSTEN WIRE MESH, LG Plansee No.: 11637442		EA	OEM:PLANSEE DESIGN	2 EA	(EA)
40	G3 ELECTRODE HOLDER, TUN WIRE MESH Plansee No.: 11637441	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
50	SCREW, GRAPHITE Plansee No.: 11636618		EA	OEM:PLANSEE DESIGN	18 EA	(EA)
60	SINGLE LE ELECTRODE, GROUND Plansee No.: 11637438	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
70	BRACKET, SUPPRESSION Plansee No.: 11636523		EA	OEM:002085881	1 EA	(EA)
80	TUNGSTEN MESH FRAME, SMALL Plansee No.: 11637437	X Non-stock product	AS	OEM:PLANSEE DESIGN	2 AS	(AS)
90	BRACKET, GROUND Plansee No.: 11636510		EA	OEM:002080409	1 EA	(EA)
100	ELECTRODE HOLDER, TUN WIRE MESH Plansee No.: 11637440	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
110	TUNGSTEN WIRE MESH, SM Plansee No.: 11637443		EA	OEM:PLANSEE DESIGN	2 EA	(EA)