Service number  USA: +1 760 438 9090

 Search by OEM Material 


Create Catalog PDF Create Catalog PDF

  810 PLASMA FLOOD  (10046893)  



Version 2

Most fabs currently using this design. Extended Life Filament (140) should only be used on Version 2. It has been shown to increase the PFG service life up to 2.5X.

Alignment jig (150) for extended life filament not shown.

Item Plansee No. Description
Status
OEM No
Qty
10 11635610 PFG APERTURE* E17225960 1 EA
20 11635072 PFG FILAMENT, .050   E17041850 1 EA
30 11363512 PFG FILAMENT CLAMP ASSY, TA E17324960 2 EA
40 11635769 PFG FILAMENT INSULATOR E17270580 1 EA
50 11634761 NUT, FILAMENT CLAMP E17058140 2 EA
60 11634847 RETAINER, PFG FILAMENT E17116730 2 EA
70 11637072 APERTURE,PFG,IMPREG,IMP   E17225961 1 EA
80 11372540 PFG Filament E17041850 1 STK
90 11373090 CLAMP, FILAMENT E17042050 2 STK
100 11373092 Holder, Clamp E17042040 2 STK
110 11633229 FILAMENT INSULATOR, PFG E17042000 1 EA
120 11634761 NUT, FILAMENT CLAMP E17058140 2 EA
130 11634847 RETAINER, PFG FILAMENT E17116730 2 EA
140 11792468 FILAMENT BERNAS PFG G17696400 1 STK
150 11873343 PIG TAIL FILAMENT PFG JIG PLANSEE DESIGN 1 STK