Advanced ion implanter spare parts

Application Note
Item 60 is a modified version of the Insert, Aperture Plate to extend the part life and reduce the PM frequency of the assembly.

10	440, SHCS, .250, SST, VENTED Plansee No.: 11628259		EA	OEM:3320404	4 EA	(EA)
20	SST 4-40 SHCSOV .375LG Plansee No.: 11636173		EA	OEM:E47000322	2 EA	(EA)
30	RETAINER APERTURE PLATE Plansee No.: 11981062		pce	OEM:E17753890	2 STK	(pce)
40	PLATE, APERTURE, ENTRANCE, GRAPHITE Plansee No.: 11981058		pce	OEM:E17780580	1 STK	(pce)
50	INSERT, APERTURE PLATE Plansee No.: 11981063	X Non-stock product	pce	OEM:E17753530	2 STK	(pce)
60	INSERT, APERTURE PLATE, EXT Plansee No.: 11994059		pce	OEM:PLANSEE DESIGN	2 STK	(pce)
70	INSERT, APERTURE PLATE Plansee No.: 12098440	X Non-stock product	pce	OEM:PLANSEE DESIGN	2 STK	(pce)
80	TUNNEL, APERTURE, VEEF Plansee No.: 12139093	X Non-stock product	pce	OEM:E17568060	1 STK	(pce)
90	TUNNEL APERTURE KIT Plansee No.: 12593686	X Non-stock product	KIT	OEM:E11564830	1 KIT	(KIT)