Advanced ion implanter spare parts

10	ARC SLIT, 20R, MO Plansee No.: 11370933		OEM:17165580	1 EA	()
20	REPELLER, NO HOLE, W Plansee No.: 11633273		OEM:PLANSEE DESIGN	1 EA	()
30	REPELLER INSULATOR Plansee No.: 11754859		OEM:17121850	1 STK	()
40	Mo INNER CUP SHIELD EGN-21750 Plansee No.: 11631975		OEM:17121750	1 EA	()
50	REPELLER SCREW Plansee No.: 346803		OEM:17121770	1 EA	()
60	Arc Chamber Plansee No.: 11370947		OEM:17133400	1 EA	()
70	BODY, ARC CHAMBER (ELS) Plansee No.: 11631794	X Non-stock product	OEM:PLANSEE DESIGN	1 EA	()
80	SPACER, SHOULDER SCREW Plansee No.: 11631548		OEM:17128230	4 EA	()
90	ROD, RETAINING TA Plansee No.: 11631973		OEM:17036440	4 EA	()
100	SPACER, RETAINING ROD Plansee No.: 11631539		OEM:17124410	4 EA	()
110	Retaining Ring, E-Type Plansee No.: 11629904		OEM:4300031	4 EA	()
120	SPRING, SHOULDER SCREW Plansee No.: 11631551		OEM:4001166	4 EA	()
130	SOCKET JOINT Plansee No.: 11622456		OEM:17033150	3 EA	()
140	HEAT SHIELD ELS Plansee No.: 11381304		OEM:17142660	1 STK	()
150	SPRING, SHOULDER SCREW Plansee No.: 11631551		OEM:4001166	3 EA	()
160	*Ball Joint Plansee No.: 11622445		OEM:17033160	3 EA	()
170	SPRING, RETAINING ROD Plansee No.: 11631756		OEM:4000059	4 EA	()
180	NUT PLATE, MOLY ELS Plansee No.: 11631984		OEM:17189140	1 EA	()
190	SCREW, ARC CHAMBER MOUNT Plansee No.: 11634806	X Non-stock product	OEM:17127640	4 EA	()