Advanced ion implanter spare parts

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SOURCE ASSEMBLIES (10056410)

ULTRA/GSD III/HC3 SOURCE» (10048013)

ULTRA/GSD III/HC3 SOURCE

ULTRA/GSD III/HC3 4.5/5.5 SOURCE» (10048000)

ULTRA/GSD III/HC3 4.5/5.5 SOURCE

GSD III HC3 ION SOURCE» (10064789)

GSD III HC3 ION SOURCE

Plansee replacement components and assemblies for OEM systems

AMAT 9500 - xR (10050140)

AMAT QUANTUM I - X (10048841)

AMAT QUANTUM X+ (10047242)

AMAT VIISTA HIGH CURRENT (10048186)

AMAT VIISTA HIGH ENERGY (10052372)

AMAT VIISTA MEDIUM CURRENT (10046896)

AMAT VIISTA TRIDENT (10051745)

AXCELIS MISCELLANEOUS (10058495)

AXCELIS OPTIMA (10052165)

AXCELIS PARADIGM XE/HE3 (10048856)

AXCELIS PURION HIGH CURRENT (10059513)

AXCELIS PURION HIGH ENERGY (10063434)

AXCELIS PURION MEDIUM CURRENT (10048853)

ION MILLING (10069140)

NISSIN EXCEED (10047244)

SEN HIGH CURRENT (10048976)

SEN HIGH ENERGY (10048977)

SEN MEDIUM CURRENT (10048975)

SEN/AXCELIS GSD 200MM HIGH CURRENT (10049007)

SEN/AXCELIS GSD 200MM HIGH ENERGY (10050311)

SEN/AXCELIS ULTRA/GSD III/HC3 HC 300MM (10051382)

VARIAN 350D (10051640)

VARIAN E1000 (10051758)

VARIAN E220/E500 (10047453)

VARIAN KESTREL (10051645)

VARIAN VIISION (10047509)

VARIAN XP (10058405)

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