Advanced ion implanter spare parts

GSD III HC3 ION SOURCE (10064789)

10	ARC SLIT AND RETAINER, W Plansee No.: 11627728	X Non-stock product	EA	OEM:17360750	1 EA	(EA)
20	ARC SLIT AND RETAINER Plansee No.: 14463562	X Non-stock product	pce	OEM:17360750	1 STK	(pce)
30	ARC CHAMBER Plansee No.: 11633955	X Non-stock product	EA	OEM:17359610	1 EA	(EA)
40	CATHODE REPELLER Plansee No.: 11633952		EA	OEM:17355290	1 EA	(EA)
50	Cathode Eterna Plansee No.: 11372213		pce	OEM:17355270	1 EA	(pce)
60	CATHODE SUPPORT PLATE Plansee No.: 11632830		EA	OEM:17287860	1 EA	(EA)
70	SUPPORT PLATE, REVERSIBLE CATHODE Plansee No.: 11633345		EA	OEM:17287860	1 EA	(EA)
80	FILAMENT, ELS, STRAIGHT Plansee No.: 11632827		EA	OEM:17287850	1 EA	(EA)
90	Filament ELS Assy Plansee No.: 11372527		pce	OEM:17287850	1 EA	(pce)
100	CLAMP FILAMENT Plansee No.: 11097914	X Non-stock product	pc	OEM:17287880	2 EA	(pc)
110	INSULATOR, CATHODE Plansee No.: 11632829		EA	OEM:17287870	1 EA	(EA)
120	RETAINING ROD Plansee No.: 11391899	X Non-stock product	pce	OEM:17D6403	4 STK	(pce)
130	SPRING, RETAINING ROD Plansee No.: 11631756		EA	OEM:4001167	4 EA	(EA)
140	Retaining Ring, E-Type Plansee No.: 11629904		EA	OEM:E43000005	4 EA	(EA)
150	NOZZLE, GAS Plansee No.: 11633956	X Non-stock product	EA	OEM:17357190	1 EA	(EA)
160	SST SET SCREW .500LG Plansee No.: 1112378	X Non-stock product	EA	OEM:	2 EA	(EA)
170	ELS REPELLER Plansee No.: 12073200	X Non-stock product	pce	OEM:17334410	1 STK	(pce)
180	ELS Repeller (W) Plansee No.: 11372125		pce	OEM:17334410	1 STK	(pce)
190	REPELLER INSULATOR Plansee No.: 11754859		pce	OEM:17121850	2 STK	(pce)
200	MOUNT, REPELLER Plansee No.: 11635466		EA	OEM:17362990	1 EA	(EA)
210	Mo INNER CUP SHIELD EGN-21750 Plansee No.: 11631975		EA	OEM:17121750	2 EA	(EA)