Advanced ion implanter spare parts

PAS BERNAS LINER OPTIONS (10047642)

Application Note

Use 40 or 90 with vaporizer feed and 50 or 100 with gas only ion source. Textured liners are recommended for use where deposits or flaking are likely to cause source failure.

Items 140 to 170 are textured lanthanated tungsten liners that are beneficial for customer running more fluorinated processes to minimize the effects of "halogen cycling".

10	END LINER Plansee No.: 11632803		EA	OEM:PLANSEE DESIGN	2 EA	(EA)
20	SIDE LINER W/NOZZLE Plansee No.: 11632801		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
30	SIDE LINER Plansee No.: 11632802		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
40	BASE LINER, VAP. Plansee No.: 11633139		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
50	BASE LINER Plansee No.: 11632804		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
60	END LINER TEXTURED Plansee No.: 11637327	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
70	SIDE LINER W/ NOZ TEXTURED Plansee No.: 11637329	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
80	SIDE LINER TEXTURED Plansee No.: 11637328	X Non-stock product	EA	OEM:PLANSEE DESIGN	4 EA	(EA)
90	BASE LINER TEXTURED, VAP Plansee No.: 11637365	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
100	BASE LINER TEXTURED, NON-VA Plansee No.: 11637326	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
110	A/C TOP SHIM Plansee No.: 11632805		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
120	A/C TOP SHIM TEXTURED Plansee No.: 11637325	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
130	VIISION A/C TOP SHIM Plansee No.: 11635897	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
140	END LINER TEXTURED Plansee No.: 11988708		pce	OEM:PLANSEE DESIGN	1 STK	(pce)
150	SIDE LINER, NOZZLE, TEXTURED Plansee No.: 11988728		pce	OEM:PLANSEE DESIGN	1 STK	(pce)
160	SIDE LINER TEXTURED Plansee No.: 11988816		pce	OEM:PLANSEE DESIGN	1 STK	(pce)
170	BASE LINER TEXTURED Plansee No.: 11988838		pce	OEM:PLANSEE DESIGN	1 STK	(pce)