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  9500 HDPFS MOUNTING  (10051698)  



Application Note:
The assembly shown on this page represents the mounting components found in one of the 9500/XR HD-PFS assemblies. For information on the parts used in your tools HD-PFS, please record the engraved OEM No. on the source chamber assembly (shown in the image above on the bottom right) and contact your local representative for more information on your specific kit.


  Number of products:33
Product list (.XLS)
10
 MOUNT BRACKET, RIGHT  Plansee No.:  11560413
pce OEM:004097998 1 EA
 
20
 MOUNT BRACKET, LEFT  Plansee No.:  11560430
pce OEM:002190361 1 EA
 
30
 MOUNT PLATE,TOP  Plansee No.:  11560420
pce OEM:002190362 1 EA
 
40
 INSULATOR, TYPE SM7  Plansee No.:  11635820
EA OEM:002190020 6 EA
 
50
 SST WASHER, FLAT, M5  Plansee No.:  11631310
EA OEM:388090184 15 EA
 
60
 SST BHCS .787LG  Plansee No.:  11631399
EA OEM:369091118 14 EA
 
70
 MOUNT PLATE, INSULATOR  Plansee No.:  11636032
EA OEM:002190364 1 EA
 
80
 INSULATING FLANGE  Plansee No.:  11550637
pce OEM:002190214 1 EA
 
90
 SST BHCS 1.181 IN.LG  Plansee No.:  11606417
pce OEM:369091122 3 EA
 
100
 INSULATING FLANGE  Plansee No.:  11550638
pce OEM:002190215 1 EA
 
110
 WASHER, SST SINGLE COIL  Plansee No.:  11631821
EA OEM:338090042 2 EA
 
120
 SST WASHER, FLAT, M6  Plansee No.:  11631822
EA OEM:338090045 2 EA
 
130
 NUT, SST HEX  Plansee No.:  11631823
EA OEM:350090132 2 EA
 
140
 INSULATOR  Plansee No.:  11629130
EA OEM:342090096 2 EA
 
150
 CONN STRAP SET  Plansee No.:  11636044
EA OEM:004090113 1 EA
 
160
 SOURCE CHAMBER ASSY  Plansee No.:  11636038
AS OEM:004097999 1 AS
 
170
 FEED ROD SET  Plansee No.:  11636035
SET OEM:002190018 1 JEU
 
180
 SCREW, M4X.7, SHCSOV, .315IN LG, SST  Plansee No.:  11631397
EA OEM:369091176 12 EA
 
190
 SST WASHER, FLAT, M4  Plansee No.:  11631169
EA OEM:388090183 8 EA
 
200
 SPUTTER SHIELD  Plansee No.:  11631874
EA OEM:002190373 1 EA
 
210
 GAS LINE ASSEMBLY  Plansee No.:  11636034
AS OEM:004090141 1 AS
 
220
 GASKET, 1/4-1/2 VCR PTFE  Plansee No.:  11630707
EA OEM:002089168 1 EA
 
230
 SCREW, SST FH .394LG  Plansee No.:  11631448
EA OEM:369091175 4 EA
 
240
 O RING .239 ID  Plansee No.:  11632148
EA OEM:370090467 1 EA
 
250
 WASHER, LOCK SST  Plansee No.:  11631131
EA OEM:388090182 12 EA
 
260
 BOLT, SST SHOULDER .157LG  Plansee No.:  11631464
EA OEM:369091179 3 EA
 
270
 SUPPORT PLATE  Plansee No.:  11636008
EA OEM:002190305 1 EA
 
280
 SST SHCS  Plansee No.:  11606716
pce OEM:369091119 4 EA
 
290
 INSULATOR, SUPPORT PLATE  Plansee No.:  11550639
pce OEM:002190216 1 EA
 
300
 MOUNT PLATE, SOURCE CHAMBER  Plansee No.:  11563652
pce OEM:002190363 1 EA
 
310
 SST LOCK WASHER (MLW-05)  Plansee No.:  11631137
EA OEM:338090044 9 EA
 
320
 CONNECTOR STRAP SET  Plansee No.:  11635838
SET OEM:004001477 1 JEU
 
330
 SOURCE CHAMBER ASSY.  Plansee No.:  11636061
  AS OEM:004002612 1 AS