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  9500 - XR IHC ION SOURCE CONSUMABLES  (10051223)  



XR / QUANTUM CATHODE OPTIONS»  (10047542)

XR / QUANTUM CATHODE OPTIONS

XR / QUANTUM ION SOURCE LINERS»  (10047540)

XR / QUANTUM ION SOURCE LINERS

IHC FRONT PLATES»  (10048787)

IHC FRONT PLATES

Application Note:

The cam (#230) and cam retainer (#220) shown are minor modifications of the standard parts (0020-84806 & 0020-84807) and have been designed to secure together via threads, instead of press fit.

These parts are not inter-changeable with the AMAT design and must be used together.

Plansee also offers a one-piece, graphite, top plate (Part No. 11684422) that helps ensure consistent aperture size and location for customers that replace both sides during each PM.


  Number of products:29
Product list (.XLS)
10
 RETAINER, FRONT PLATE  Plansee No.:  11392015
  pce OEM:002084744 1 STK
 
20
 FRONT PLATE, L/H, GPH  Plansee No.:  11631951
EA OEM:002084907 1 EA
 
30
 FRONT PLATE, R/H, GPH  Plansee No.:  11560966
pce OEM:002084743 1 EA
 
40
 LINER, SIDE, W  Plansee No.:  345837
pc OEM:002086738 2,000 ST
 
50
 LINER, END ANTI-CATHODE  Plansee No.:  11631954
EA OEM:002086740 1 EA
 
60
 Anti-Cathode,W,Modified Shaft  Plansee No.:  235781
pc OEM:002081482 1 EA
 
70
 SUPPORT BAR, ANTI-CATHODE  Plansee No.:  302705
pc OEM:002080070 1 EA
 
80
 THUMBSCREW,M4,CAPTIVE  Plansee No.:  11381264
pce OEM:002098911 6 STK
 
90
 SHIELD, INSULATOR  Plansee No.:  11630713
EA OEM:002085362 1 EA
 
100
 INSULATOR W/HELICOIL  Plansee No.:  11630708
EA OEM:002097557 8 EA
 
110
 ARC CHAM INDIRECT  Plansee No.:  11633614
EA OEM:002086736 1 EA
 
120
 PLUG, ARC CHAMBER, SDS  Plansee No.:  11631660
EA OEM:002085074 2 EA
 
130
 SLEEVE, OVEN NOZZLE  Plansee No.:  11381958
pce OEM:002081226 1 EA
 
140
 LINER, BASE, W  Plansee No.:  345844
pc OEM:002086737 1,000 ST
 
150
 E-CLIP TO SUIT M4 SHFT SS  Plansee No.:  11629075
EA OEM:069090188 4 EA
 
160
 COMPRESSION SPRING  Plansee No.:  11630771
  EA OEM:378090110 4 EA
 
170
 SST WASHER, FLAT, M4  Plansee No.:  11631169
EA OEM:388090021 8 EA
 
180
 PIN, RETAINING  Plansee No.:  11630706
  EA OEM:002096040 4 EA
 
190
 SUPPORT BAR, CATHODE  Plansee No.:  335000
pc OEM:004096352 1 EA
 
200
 SHIELD, INSULATOR LONG  Plansee No.:  11632314
EA OEM:002086933 4 EA
 
210
 FILAMENT CLAMP, L/H  Plansee No.:  11631952
EA OEM:002086734 1 EA
 
220
 CAM RETAINER  Plansee No.:  11633257
EA OEM:PLANSEE DESIGN 2 EA
 
230
 CAM, FILAMENT CLAMP  Plansee No.:  11633256
EA OEM:PLANSEE DESIGN 2 EA
 
240
 FILAMENT CLAMP, R/H  Plansee No.:  11631953
EA OEM:002086733 1 EA
 
250
 FILAMENT GUIDE  Plansee No.:  11088138
pc OEM:002087508 2 EA
 
260
 FILAMENT, ARC CHAMBER, IHC  Plansee No.:  332103
pc OEM:002086735 1 EA
 
270
 W Cathode, 3 mm Button  Plansee No.:  11160370
SA OEM:004096830 1 SA
 
280
 LINER, END CATHODE  Plansee No.:  11631957
EA OEM:002089586 1 EA
 
290
 SUPPORT, UPPER  Plansee No.:  11381268
pce OEM:PLANSEE DESIGN 1 EA