Advanced ion implanter spare parts

Application Notes

Item 50, 60 are modified front plates with narrower/longer shape of aperture slit adapted with specific recipe by OEM.

10	FRONT PLATE, R/H, GPH Plansee No.: 11560966		pce	OEM:002084743	1 EA	(pce)
20	FRONT PLATE, L/H, GPH Plansee No.: 11631951		EA	OEM:002084907	1 EA	(EA)
30	FRONT PLATE, R/H, W Plansee No.: 11372087		pce	OEM:002087683	1 STK	(pce)
40	FRONT PLATE, L/H, W Plansee No.: 11372086		pce	OEM:002087684	1 STK	(pce)
50	FRONT PLATE, R/H Plansee No.: 11812363		pce	OEM:002042113	1 STK	(pce)
60	FRONT PLATE, L/H Plansee No.: 11812356		pce	OEM:002042096	1 STK	(pce)
70	FRONTPLATE-FEMALE Plansee No.: 11809193		pce	OEM:002010328	1 STK	(pce)
80	FRONTPLATE-MALE Plansee No.: 11809194		pce	OEM:002010329	1 STK	(pce)
90	FRONT PLATE, ONE PIECE, GPH Plansee No.: 11684422		EA	OEM:PLANSEE DESIGN	1 EA	(EA)
100	FRONT PLATE, ONE-PIECE, W Plansee No.: 11633772		EA	OEM:019038568	1 EA	(EA)
110	FRONT PLATE, ONE-PIECE, GPH, W/ SLIT Plansee No.: 11637101	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
120	FRONT PLATE, ONE PIECE, W, W/SLIT Plansee No.: 11634340	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)