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  ION SOURCE CONSUMABLES  (10048838)  



Application Note:

The cam (#160) and cam retainer (#170) shown are minor modifications of the standard parts (0020-84807 & 0020-84806) and have been designed to secure together via threads, instead of press fit. These parts are not inter-changeable with the AMAT design and must be used together.

The arc chambers shown with balloons 210 (200mm) and 240 (300mm) are different because of the gaps milled into the top of the chamber for fitting with the mating arc slits. These parts are not interchangeable and must correspond to the proper arc slits.


  Number of products:25
10
Anti-Cathode,W,Modified Shaft  Plansee No.:  235781
pc OEM:002081482 1 EA
 
20
LINER, END ANTI-CATHODE  Plansee No.:  11631954
EA OEM:002086740 1 EA
 
30
RETAINER, HOOK  Plansee No.:  11635624
EA OEM:002190036 2 EA
 
40
FRONTPLATE R/H 650MM RAD  Plansee No.:  11560974
pce OEM:002190787 1 EA
 
50
FRONTPLATE L/H 650MM RAD  Plansee No.:  11633335
EA OEM:002190786 1 EA
 
60
LINER, END CATHODE  Plansee No.:  11631957
EA OEM:002089586 1 EA
 
70
LINER, SIDE, W  Plansee No.:  345837
pc OEM:002086738 2 EA
 
80
CATHODE, SLOTTED  Plansee No.:  11159889
SA OEM:004047909 1 EA
 
90
SUPPORT BAR, CATHODE  Plansee No.:  335000
pc OEM:004096352 1 EA
 
100
Screw, Captive, M4  Plansee No.:  11370383
pce OEM:002085805 6 EA
 
110
FILAMENT GUIDE  Plansee No.:  11088138
pc OEM:002087508 2 EA
 
120
FILAMENT, ARC CHAMBER, IHC  Plansee No.:  332103
pc OEM:002086735 1 EA
 
130
Screw, Captive, M4  Plansee No.:  11549843
pce OEM:002085806 2 STK
 
140
FILAMENT CLAMP, L/H  Plansee No.:  11631952
EA OEM:002086734 1 EA
 
150
FILAMENT CLAMP, R/H  Plansee No.:  11631953
EA OEM:002086733 1 EA
 
160
CAM, FILAMENT CLAMP  Plansee No.:  11633256
EA OEM:PLANSEE DESIGN 2 EA
 
170
CAM RETAINER  Plansee No.:  11633257
EA OEM:PLANSEE DESIGN 2 EA
 
180
PLUG, ARC CHAMBER, SDS  Plansee No.:  11631660
EA OEM:002085074 2 EA
 
190
SLEEVE, OVEN NOZZLE  Plansee No.:  11381958
pce OEM:002081226 1 EA
 
200
LINER, BASE, W  Plansee No.:  345844
pc OEM:002086737 1.000 ST
 
210
ARC CHAMBER INDIRECT  Plansee No.:  11632160
EA OEM:002089990 1 EA
 
220
THUMBSCREW, M4  Plansee No.:  11630716
EA OEM:002098911 4 EA
 
230
SUPPORT BAR, ANTI-CATHODE  Plansee No.:  302705
pc OEM:002080070 1 EA
 
240
ARC CHAMBER, QUANTUM II  Plansee No.:  11633771
EA OEM:002021355 1 EA
 
250
W Anti Cathode, grooved, 42.771/1  Plansee No.:  11127152
pc OEM:PLANSEE DESIGN 1.000 ST