Advanced ion implanter spare parts

CATHODE/ANTI-CATHODE CLAMPS (10047539)

Application Note:
The cathode and anti-cathode clamp options, shown here with the screw and hex nut balloons, are offered as a way to extend the part life past the original designs capability. To ensure the longest possible part life, it is not recommended that the screw and nut be used until the clamp shows signs losing tension.

10	SUPPORT BAR, CATHODE Plansee No.: 335000		pc	OEM:004096352	1 EA	(pc)
20	SUPPORT BAR, CATH DIA 16.5 Plansee No.: 11635312	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
30	SOCKET HEAD CAP SCREW M4X.7 X 25mm Plansee No.: 11635311	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
40	HEX NUT, MEDIUM M4X.7 WS2 COATED Plansee No.: 11635309	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
50	SUPPORT BAR, ANTI-CATHODE Plansee No.: 302705		pc	OEM:002080070	1 EA	(pc)
60	SUPPORT BAR, ANTICATHODE, SN Plansee No.: 11635330	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)
70	SST SHCS .630LG. Plansee No.: 11630805	X Non-stock product	EA	OEM:PLANSEE DESIGN	1 EA	(EA)