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  XR / QUANTUM ION SOURCE LINERS  (10047540)  



Application Note
Items 20, 60, 70, 180, 190 are WL versions of the standard liners and have shown the ability to dramatically reduce the halogen cycling effect present in tools that run high levels of fluorinated processes.

To reduce flaking, a counter-bore and textured liners are developed to help reduce cathode growth related shorts.


  Number of products:19
Product list (.XLS)
10
 LINER, SIDE, W  Plansee No.:  345837
pc OEM:002086738 2 EA
 
20
 LINER, SIDE, WL  Plansee No.:  11147281
pc OEM:PLANSEE DESIGN 2.000 ST
 
30
 LINER,BASE  Plansee No.:  11412245
pce OEM:002190352 1 STK
 
40
 LINER, BASE, W  Plansee No.:  345844
pc OEM:002086737 1.000 ST
 
50
 LINER, BASE, W  Plansee No.:  11120029
pc OEM:002025729 1 EA
 
60
 LINER, BASE, WL  Plansee No.:  11923797
pce OEM:PLANSEE DESIGN 1 STK
 
70
 LINER, BASE, WL  Plansee No.:  11147296
pc OEM:PLANSEE DESIGN 1.000 ST
 
80
 LINER, END CATHODE  Plansee No.:  11631957
EA OEM:002089586 1 EA
 
90
 LINER, END ANTI-CATHODE  Plansee No.:  11631954
EA OEM:002086740 1 EA
 
100
 LINER, END, CATHODE  Plansee No.:  11372093
pce OEM:002190405 1 STK
 
110
 LINER, END, ANTI-CATHODE  Plansee No.:  11372090
pce OEM:002090404 1 STK
 
120
 LINER, END, CATHODE, TEX, W  Plansee No.:  11146704
pc OEM:002025777 1.000 ST
 
130
 LINER, END, ANTI-CATHODE, TEX, W  Plansee No.:  11146716
pc OEM:002025733 1 EA
 
140
 Liner, End, Cathode Tungsten  Plansee No.:  11372088
pce OEM:PLANSEE DESIGN 1 STK
 
150
 LINER, END, CATHODE, TEXT AND C-BORED  Plansee No.:  11712138
  pce OEM:PLANSEE DESIGN 1 STK
 
160
 LINER, END, CATHODE, TEX, GPH  Plansee No.:  11636412
EA OEM:PLANSEE DESIGN 1 EA
 
170
 LINER, END, ANTI-CATHODE, TEX, GPH  Plansee No.:  11627716
EA OEM:PLANSEE DESIGN 1 EA
 
180
 LINER, END, CATHODE, TEX, WL  Plansee No.:  11120034
pc OEM:PLANSEE DESIGN 1.000 ST
 
190
 LINER, END, ANTI-CATHODE, TEX, WL  Plansee No.:  11120032
pc OEM:PLANSEE DESIGN 1.000 ST